New technology of large area diamond self-supporting film mechanical polishing 1
Guo Shibin 1, Qu Yang 2, Lu Fanxiu, Tang Weizhong 1, Tong Yumei 1, Song Jianhua 1
1. Institute of Functional Materials, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing (100083)
2. Shenyang Kejing Equipment Manufacturing Co., Ltd., Shenyang (110168)
Abstract: This paper studies a new mechanical polishing technique for diamond self-supporting films prepared by polishing plasma sputtering CVD. The experiment explored the effects of the rotating disk speed, the size of the diamond powder particles, and the surface shape of the grinding disk on the grinding and polishing rate of the diamond self-supporting film. The research shows that the grooved disk has obvious rough grinding effect on the diamond self-supporting film, and the rate is higher. The flat disk is beneficial to improve the surface roughness of the diamond self-supporting film; The rotation speed of the cutting capacity. At this rotation speed, the grinding and polishing rate of the diamond self-supporting film is about 12 Î¼m / h. In this paper, through the exploration of new process parameters, it provides strong technical support for the subsequent processing of diamond self-supporting film.
Keywords: diamond self-supporting film; mechanical polishing; new technology
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